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Phosphine Sensor (PH3 Sensor) - PH3-BE

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• Range: 2,000ppm PH3 limit of performance warranty
• Sensitivity: 15 to 35nA/ppm in 800 PH3
• Response time t90: < 30 s from zero to 800 PH3
• Resolution: < 2 RMS noise (ppm equivalent)
• Temperature range: -20 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 20 to 90 % rh continuous
• Weight: < 13g

Model Number: PH3-BE
Data Sheet:

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Product Specification

PH3-BE Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

We have also introduced the PH3-BE sensor specifically for food storage where higher concentrations of Phosphine are encountered.

PH3-BE Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity	nA/ppm in 800 PH3	15 to 35
Response time	t90 (s) from zero to 800 PH3	< 30
Zero current	ppm equivalent in zero air	< -6 to 20
Resolution	RMS noise (ppm equivalent)	< 2
Range	ppm PH3 limit of performance warranty	2,000
Linearity	ppm error at full scale, linear at zero, 800ppm PH3	-50 to -350
Overgas limit	maximum ppm for stable response to gas pulse	5,000

PH3-BE Phosphine Sensor PH3 Sensor LIFETIME
Zero drift	ppm equivalent change/year in lab air	< 1.5
Sensitivity drift	% change/year in lab air, monthly test	< 4
Operating life	months until 80% original signal (24 month warranted)	> 24

PH3-BE Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C	% (output @ -20°C/output @ 20°C) @ 800 ppm PH3	65 to 85
Sensitivity @ 50°C	% (output @ 50°C/output @ 20°C) @ 800 ppm PH3	120 to 140
Zero @ -20°C	ppm equivalent change from 20°C	< ±20
Zero @ 50°C	ppm equivalent change from 20°C	< ±15

PH3-BE Phosphine Sensor PH3 Sensor CROSS SENSITIVITY
H2S sensitivity	% meaured gas @ 20 ppm H2S	< 110
NO2 sensitivity	% meaured gas @ 10 ppm NO2	< -35
CL2 sensitivity	% meaured gas @ 10 ppm Cl2	< -30
NO sensitivity	% meaured gas @ 50 ppm NO	< 10
SO2 sensitivity	% meaured gas @ 20 ppm SO2	< 25
CO sensitivity	% meaured gas @ 400 ppm CO	< 11
H2 sensitivity	% meaured gas @ 400 ppm H2	< 2
C2H4 sensitivity	% meaured gas @ 80 ppm C2H4	< 60
NH3 sensitivity	% meaured gas @ 25 ppm NH3	< 0.1
CO2 sensitivity	% meaured gas @ 5% CO2	< 0.1

PH3-BE Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS
Temperature range	°C	-20 to 50
Pressure range	kPa	80 to 120
Humidity range	% rh continuous	20 to 90
Storage period	months @ 0 to 20℃ (stored in original container)	6
Load resistor	Ω (recommended)	10 to 33
Bias voltage	mV above analogue ground	not required
Weight	g	< 13

Matched Transmitter board for PH3-BE PH3 Sensor

4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change

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