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Phosphine Sensor (PH3 Sensor) - PH3-A1

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• Range: 10 ppm PH3 limit of performance warranty
• Sensitivity: 550 to 900 nA/ppm in 11ppm PH3
• Response time t90: < 25 (s) from zero to 5ppm PH3
• Resolution: < 0.03 RMS noise (ppm equivalent)
• Temperature range: -30 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 20 to 90 % rh continuous
• Weight: < 6g

Model Number: PH3-A1
Data Sheet:

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Product Specification

PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

PH3-A1 Phosphine Sensor PH3 Sensor Schematic Diagram

PH3-A1 Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity	nA/ppm in 11ppm PH3	550 to 900
Response time	t90 (s) from zero to 5ppm PH3	< 25
Zero current	ppm equivalent in zero air	< ±0.3
Resolution	RMS noise (ppm equivalent)	< 0.03
Range	ppm PH3 limit of performance warranty	10
Linearity	ppm error at full scale, linear at zero, 20ppm PH3	< -0.6
Overgas limit	maximum ppm for stable response to gas pulse	75

PH3-A1 Phosphine Sensor PH3 Sensor LIFETIME
Zero drift	ppm equivalent change/year in lab air	< ±0.05
Sensitivity	drift % change/year in lab air, monthly test	< 10
Operating	life months until 80% original signal (24 month warranted)	> 24

PH3-A1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C	%(output @ -20°C/output @ 20°C) @ 11ppm PH3	20 to 70
Sensitivity @ 50°C	% (output @ 50°C/output @ 20°C) @ 5ppm PH3	130 to 160
Zero @ -20°C	ppm equivalent change from 20°C	< ±0.04
Zero @ 50°C	ppm equivalent change from 20°C	< ±0.04

PH3-A1 Phosphine Sensor PH3 Sensor CROSSSENSITIVITY
H2S sensitivity	% meaured gas @ 20ppm H2S	< 15
NO2 sensitivity	% meaured gas @ 10ppm NO2	< -30
Cl2 sensitivity	% meaured gas @ 10ppm Cl2	< -30
NO sensitivity	% meaured gas @ 50ppm NO	< 1
SO2 sensitivity	% meaured gas @ 20ppm SO2	< 60
CO sensitivity	% meaured gas @ 400ppm CO	< 0.7
H2 sensitivity	% meaured gas @ 400ppm H2	< 0.2
C2H4 sensitivity	% meaured gas @ 80ppm C2H4	< 10
NH3 sensitivity	% meaured gas @ 25ppm NH3	< 0.2
CO2 sensitivity	% meaured gas @ 5% vol CO2	< 0.1

PH3-A1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS
Temperature range	°C	-30 to 50
Pressure range	kPa	80 to 120
Humidity range	% rh continuous	20 to 90
Storage period	months @ 0 to 20°C (stored in original container)	6
Load resistor	Ω	10 to 33
Weight	g	< 6

Matched Transmitter board for PH3-A1 PH3 Sensor

4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change