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Phosphine Sensor (PH3 Sensor) - PH3-B1

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• Range: 10ppm limit of performance warranty
• Sensitivity: 600 to 1000 nA/ppm in 5ppm PH3
• Resolution: < 0.03 RMS noise (ppm equivalent)
• Response time t90: < 20 (s) from zero
• Temperature range : -30 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 15 to 90 % rh continuous
• Load resistor: 10 to 33 Ω
• Weight: < 13 g

Model Number: PH3-B1
Data Sheet:

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Product Specification

PH3-B1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

PH3-B1 Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity	nA/ppm in 5ppm PH3	600 to 1000
Response time	t90 (s) from zero	< 20
Zero current	ppm equivalent in zero air	< -0.3 to +0.3
Resolution	RMS noise (ppm equivalent)	< 0.03
Range	ppm limit of performance warranty	10
Linearity	ppm PH3 error at full scale,linear at zero,4ppm PH3	-1 to -1.8
Overgas limit	maximum ppm for stable response to gas pulse	150

PH3-B1 Phosphine Sensor PH3 Sensor LIFETIME
Zero drift	ppm equivalent change/year in lab air	< 0.05
Sensitivity drift	% change/year in lab air, monthly test	< 4
Operating life	months until 80% original signal (24 month warranted)	> 24

PH3-B1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C	%(output @ -20°C/output @ 20°C) @ 5ppm PH3	65 to 85
Sensitivity @ 50°C	%(output @ 50°C/output @ 20°C) @ 5ppm PH3	120 to 140
Zero @ -20°C	ppm equivalent change from 20°C	< ±0.5
Zero @ 50°C	ppm equivalent change from 20°C	< 0 to +0.2

PH3-B1 Phosphine Sensor PH3 Sensor CROSS SENSITIVITY
CO sensitivity	% measured gas @ 400ppm CO	< 1
H2S sensitivity	% measured gas @ 20ppm H2S	< 170
NO2 sensitivity	% measured gas @ 20ppm NO2	< -30
Cl2 sensitivity	% measured gas @ 10ppm Cl2	< 0.1
NO sensitivity	% measured gas @ 50ppm NO	< 30
SO2 sensitivity	% measured gas @ 20ppm SO2	< 30
H2 sensitivity	% measured gas @ 400ppm H2 at 20°C	< 0.3
C2H4 sensitivity	% measured gas @ 400ppm C2H4	< 20
NH3 sensitivity	% measured gas @ 20ppm NH3	< 0.2
CO2 sensitivity	% measured gas @ 5% CO2	< 0.1

PH3-B1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONSP
Temperature range	°C	-30 to 50
Pressure range	kPa	80 to 120
Humidity range	% rh continuous	15 to 90
Storage period	months @ 3 to 20℃ (stored in sealed pot)	6
Load resistor	Ω	10 to 33
Weight	g	< 13

Matched Transmitter board for PH3-B1 PH3 Sensor

4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change