Thin-film Humidity Sensing Element - SH

  • Thin-film Humidity Sensing Element
  • Thin-film Humidity Sensing Element
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• Low cost
• Wide T/RH operating zone
• Operating temperature up to 200°C
• Excellent sensibility
• Very good dynamic properties
• Short response time
• Long-term stability
• Measurement range: 0 - 100 %RH

  • Model Number: SH
  • Data Sheet: Date Sheet File
Quantity:
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Product Specification

Thin-film Humidity Sensing Element SH

• Low cost
• Wide T/RH operating zone
• Operating temperature up to 200°C
• Excellent sensibility
• Very good dynamic properties
• Short response time
• Long-term stability

The SH relative humidity sensing element consists of a system of electrodes on a glass-ceramic substrate, covered by a humidity-sensitive polymer coating and a water-vapor permeable metallic membrane. This coating system represents a humidity-dependent capacitor. Utilizing the principal of capacitive measurement, SH measures relative humidity in air or other non-aggressive gases and gas mixtures with good long-term stability and linearity, small hysteresis, and excellent dynamic response.

SH Thin-film Humidity Sensing Element Technical specifications

Variant
1 2 3
Measurement range
0 - 100 %RH
Operating temperature
-60~200°C; with protective cap (option): -40~120 °C
Temperature dependence
RH' = [RH + a*(T-25)]*(b0 +b1 *T+b2 *T2), 
where: a = 0.04 for T ≥ 25°C, 0 for T < 25°C; b0 = 0.98; b1 = 6x10-4; b2 = 6x10-6
Permissible voltage
max. 3 VAC (no DC voltage allowed!)
Nominal capacitance
115 ± 15 pF at 20°C
135 ± 10 pF at 20°C
1050 ± 50 pF at 20°C
Sensitivity
0.25 pF / %RH
0.35 pF / %RH
2.5 pF / %RH
Non-linearity
< 1.5% at 5 - 95 %RH
< 1.5% at 5 - 95 %RH
< 1.5% at 5 - 95 %RH
Hysteresis
< 1.5 %RH at 5 - 95 %RH
< 1.5 %RH at 5 - 95 %RH
< 1.5 %RH at 5 - 95 %RH
Long-term stability
< 1 %RH per year
< 1 %RH per year
< 1.5 %RH per year
Response time
< 10 s
< 10 s
< 10 s
Loss factor
< 0.03 at 10 kHz
< 0.03 at 10 kHz
< 0.03 at 10 kHz
Operating frequency
30 - 300 kHz
30 - 300 kHz
30 - 300 kHz
Application
climate control, handheld meters, humidifiers, dehumidifiers, 
HVAC and industrial applications, high-temperature applications

SH Thin-film Humidity Sensing Element Ordering code  SH* - #1
Code
Feature or option
Code values
* Variant
1, 2, 3
#1
Protective cap
X - none, P - plastic protective cap

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