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Thin-film Humidity Sensing Element - SH

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• Low cost
• Wide T/RH operating zone
• Operating temperature up to 200°C
• Excellent sensibility
• Very good dynamic properties
• Short response time
• Long-term stability
• Measurement range: 0 - 100 %RH

Model Number: SH
Data Sheet:

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Product Specification

Thin-film Humidity Sensing Element SH

• Low cost
• Wide T/RH operating zone
• Operating temperature up to 200°C
• Excellent sensibility
• Very good dynamic properties
• Short response time
• Long-term stability

The SH relative humidity sensing element consists of a system of electrodes on a glass-ceramic substrate, covered by a humidity-sensitive polymer coating and a water-vapor permeable metallic membrane. This coating system represents a humidity-dependent capacitor. Utilizing the principal of capacitive measurement, SH measures relative humidity in air or other non-aggressive gases and gas mixtures with good long-term stability and linearity, small hysteresis, and excellent dynamic response.

SH Thin-film Humidity Sensing Element Technical specifications

Variant	1	2	3
Measurement range	0 - 100 %RH
Operating temperature	-60~200°C; with protective cap (option): -40~120 °C
Temperature dependence	RH' = [RH + a(T-25)](b0 +b1 T+b2 T²), where: a = 0.04 for T ≥ 25°C, 0 for T < 25°C; b0 = 0.98; b1 = 6x10^-4; b2 = 6x10^-6
Permissible voltage	max. 3 VAC (no DC voltage allowed!)
Nominal capacitance	115 ± 15 pF at 20°C	135 ± 10 pF at 20°C	1050 ± 50 pF at 20°C
Sensitivity	0.25 pF / %RH	0.35 pF / %RH	2.5 pF / %RH
Non-linearity	< 1.5% at 5 - 95 %RH	< 1.5% at 5 - 95 %RH	< 1.5% at 5 - 95 %RH
Hysteresis	< 1.5 %RH at 5 - 95 %RH	< 1.5 %RH at 5 - 95 %RH	< 1.5 %RH at 5 - 95 %RH
Long-term stability	< 1 %RH per year	< 1 %RH per year	< 1.5 %RH per year
Response time	< 10 s	< 10 s	< 10 s
Loss factor	< 0.03 at 10 kHz	< 0.03 at 10 kHz	< 0.03 at 10 kHz
Operating frequency	30 - 300 kHz	30 - 300 kHz	30 - 300 kHz
Application	climate control, handheld meters, humidifiers, dehumidifiers, HVAC and industrial applications, high-temperature applications