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Thermal Conductivity Gauge - XEN-3880-RW

  • Thermal Conductivity Gauge
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• Long-term stable analysis of gases in binary and quasi-binary mixtures
• High sensitivity and resolution
• Operating temperature: -250℃ to 150℃
• Humidity: 0 to 95% RH, non-condensing
• Negligible flow sensitivity

  • Model Number: XEN-3880-RW
  • Data Sheet: Date Sheet File
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Product Specification

    The XEN-3880-RW thermal conductivity gauge measures thermal conductivity of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixtures or quasi-binary mixtures where component gases have different thermal conductivity. It can also be used to measure pressure in vacuum systems.

    The sensor chip consists of a silicon frame with a silicon-nitride membrane. In the center is a heater, with a thermopile measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane.

    A silicon cover (Roof) on top of the membrane and a welded cap with filter (W) suppress flow sensitivity.

 

Features

• Long-term stable analysis of gases in binary and quasi-binary mixtures

• High sensitivity and resolution

• Operating temperature: -250℃ to 150℃

• Humidity: 0 to 95% RH, non-condensing

• Negligible flow sensitivity

 

Some Applications

• Hydrogen, helium and natural gas measurement

• Testing of hydrogen systems with helium

• Vacuum measurement in packages & vacuum systems

• Gas concentration measurement

 

Technical Specification

Ambient temperature 22℃ and 1 V power supply

Dimensions

size naked die (mm3)

2.50 x 3.33 x 0.3

Size TO-5 header (mm2)

9 Ф x 6

Length pins (mm)

13.5

weight on TO-5 (g)

0.71

weight on TO-5 + cap + filter (g)

1.05

Output

in vacuum at < 1 mPa (V/W)

130

in air at 100 kPa (V/W)

30

in air at 10 MPa (V/W)

26

in helium at 100 kPa (V/W)

7

in helium at 10 MPa (V/W)

6.9

Time constant

in air (ms)

9

in vacuum (ms)

36

Stability

short term, 1 day (ppm)

1

long term, 1 year (ppm)

300

Thermal resistance

membrane (kK/W)

100

membrane + air (kK/W)

23

Maximum heating voltage

in air (V)

2.5

in vacuum (V)

1

 

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