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Piezoresistive Silicon Stainless Steel Pressure Sensors - SPM402 Series

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• 5 to 500 PSI Pressure ranges
• -40 to 125°C Temperature Range
• Calibrated and compensated output
• Supply voltage 10V
• O-ring mounting
• High accuracy (max 0.25% linearity and max 0.05% hysteresis)

Model Number: SPM402 Series
Data Sheet:

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Product Specification

Piezoresistive Silicon Pressure Sensor for medium pressure ranges

SPM402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPM 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Media isolated sensors are designed to operate in hostile environments, yet provide the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.

The piezoresistive sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique pressure sensor design is at a minimum volume so the accuracy is greatly improved. The SPM 402 silicon pressure sensor is a thermally compensated device and has a millivolt output of up to 210mV at a 1mA supply current (or supply voltage 10V). This new pressure sensor offers design engineers excellent performance in various applications, especially for mid to high pressure and smaller solutions.

SPM402 Series Piezoresistive Silicon Pressure Sensors Features
• Calibrated and compensated
• With media separation
• Excellent chemical resistance
• O-ring mounting
• Pressure ranges: 5 to 500 psi

SPM402 Series Piezoresistive Silicon Pressure Sensors Applications
• Industrial
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)
• Process industry

SPM402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply current 1 mA at reference conditions unless otherwise specified.

Standard Pressure Ranges
PSI	bar	Output signal (Offset) [mV]			Output signal (Span) [mV]			Proof pressure [PSI/bar]		Negative pressure [PSI/bar]		Burst pressure [PSI/bar]
		min.	typ.	max.	min.	typ.	max.
5	0.35	-2	0	2	50	75	100	30	2	--	--	45	≥ 3
15	1				100	145	210	75	5	--	--	112	≥ 7.5
30	2				95	150	200	150	10	--	--	225	≥ 15
50	3.5				80	125	180	250	17.5	--	--	375	≥ 25
100	7				100	150	210	500	35	-15	-1	750	≥ 50
300	20				95	150	200	1200	80	-15	-1	1800	≥ 120
500	35				1200	175	240	1500	105	-15	-1	3150	≥ 210
Supply / Performance
					min.			typ.			max.
Supply current [mA]					-			1			3
Supply voltage [V]					-			-			10
Linearity [% FSO BFSL]					-0.25			± 0.1			0.25
Hysteresis [%FSO]					-0.05			± 0.03			0.05
Input impedance [kΩ]					4.0 to 6.0
Output impedance [kΩ]					4.0 to 6.0
Insulation resistance [MΩ]					50 (between housing and sensor chip) @ 50 V DC
Thermal errors
					min.			typ.			max.
TC Offset [% FS0/10K]					-0.7			-0.1			0.7
TC Span [% FS0/10K]					-2.4			-1.9			-1.6
TC resistance [%/10K]					2.4			2.75			3.3
All parameteres are measured in the temperature range of 0 to 70 °C (32 to 158 °F)
Operating temperature ranges
Media					-40 to 125 °C (-40 to 257 °F)
Storage					-40 to 125 °C (-40 to 257 °F)
Mecanical stability
Vibration					10 g RMS (20 to 2000 Hz)
Schock					100 g / 11 ms
Electrical conditions
Standard					4 solder pads ppitch 2.54
Materials
Housing					Stainless steel 316L (1.4404)
Diaphragm					Stainless steel 316L (1.4435)
Media wetted parts					Housing, diaphragm
Miscellaneous
Installation position					any
Protection class					IP 00
Weight					Standard: approx. 10 g
Sealing					O-Ring 15.5 x 1.5 (material: FKM)