Digital Gas Flow Sensor - MFM2070U

  • Digital Gas Flow Sensor
  • Digital Gas Flow Sensor
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• Flow Range: 0.07 ~ 70 SLM
• Operating Temperature Range: -40 ~ 85°C
• Accuracy: +/-2.5% Reading
• Resolution​: 15bit
• Sampling Time: 7.5ms
• Low Power Consumption
• Digital I2C

  • Model Number: MFM2070U
  • Data Sheet: Date Sheet File
Quantity:
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Product Specification

MFM2070U Digital Gas Flow Sensor DESCRIPTION
MFM2000 series is a gas flow sensor with low pressure drop capable of measuring medical gases up to 70 lpm. It is configured to be customizable with different flow inlet and outlet configurations.

MFM2070U Digital Gas Flow Sensor FEATURES
• Low Pressure Drop Flow Sensor
• High Accuracy +/-2.5% Reading
• Calibrated and Temperature Compensated for Air
• Low Power Consumption
• Digital I2C
• Made for Medical Applications 
• Calibrated for Air, and O2

MFM2070U Digital Gas Flow Sensor FLOW PERFORMANCE
Measurements performed with air at 23°C, 1 Atm, 50% RH, at 3.3V DC power supply, unless otherwise specified. Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

Parameter
Condition
Min
Typical
Max
Unit
Flow Range
Calibration gas: Air
0.07
70 SLM
Calibrated Temperature Range

0
50 °C
Operating Temperature Range

-40 
10 85 °C
Storage Temperature Range

-40 

105 °C
Accuracy
25ºC

+/-2.5

% Reading
Temperature Error
0-50ºC


0.1 reading/°C
Resolution
I2C

15
bit
Sampling Time


7.5

ms
Power Consumption
@ Recommended Heater
Power at zero Flow


7.0 mA
PD


650 uA
Pressure Drop
Max flow without mesh


120 Pa
Max flow(with mesh screen)


400 Pa
Operating Pressure Range
Absolute
0.7
1.3 Bar
Operating Overpressure
Absolute

+/-0.2

Bar
Averaging
10 frames running window averaging
Wetted Materials
PES (Medical grade: biocompatible; ISO 10993 or USP Class VI), FR4, Silicon
Nitrite, Silicon, Epoxy, Gold.
Standards
RoHS, REACH, ISO15001, ISO10993-1, ISO10993-5,UL94 V0, IEC

ELECTRICAL SPECIFICATIONS (VDD=3.3V, TA=25C, UNLESS OTHERWISE NOTED)
Parameter
Condition
Min
Typical
Max
Unit
Supply DC Voltage
DC
2.7 3.3 5.5 V
Power Consumption
@ Recommended Heater Power at
zero Flo


7.0 mA
PD


650 uA
Data format Scaling Factor
User read count value from register 0,
then multiply by 2.5 to get actual
flow rate in sccm
2.5
sccm

MFM2070U Digital Gas Flow Sensor MECHANICAL SPECIFICATIONS
Specification
Condition
Min
Typical
Max
Unit
Burst Pressure
Over ambient
1

Bar

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