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Miniature SMD Pressure Sensors - MS54xx

  • Miniature SMD Pressure Sensors
  • Miniature SMD Pressure Sensors
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• 1, 7, 12, and 70 bar absolute pressure range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Miniature surface mount
• Ceramic carrier
• Low noise, high sensitivity, high linearity
• Small size
• High reliability, low drift
• -40 °C to +125 °C operation range

  • Model Number: MS54xx
  • Data Sheet: Date Sheet File
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Product Specification

MS54xx Miniature SMD Pressure Sensors Description:
The MS54xx SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier or a 6.1 x 6.3 mm PCB protected by a metal or plastic cap. The MS54xx can be delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure.

Carrier
 Full scale
pressure
 High Sensitivity Versions
 High Linearity Versions
Product code
 Full scale
span
 Linearity
 Product code
 Full scale
span
 Linearity
Ceramic
 1 bar
 MS5401-AM
 240 mV
 ±0.20 % FS
 MS5401-BM
 150 mV
 ±0.05 % FS
7 bar
 MS5407-AM
 392 mV
 ±0.20 % FS
12 bar
MS5412-BM
 150 mV
 ±0.05 % FS
70 bar
 MS5470-AM
 310 mV
 ±0.25 % FS

MS54xx Miniature SMD Pressure Sensors Features:
• 1, 7, 12, and 70 bar absolute pressure range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Miniature surface mount
• Ceramic carrier
• Low noise, high sensitivity, high linearity
• Low cost SMD package
• Small size
• High reliability, low drift
• -40 °C to +125 °C operation range
• Gel protection against humidity and water

MS54xx Miniature SMD Pressure Sensors Applications: 
• Brake systems
• High resolution altimeters, variometer
• Barometers
• Engine management
• Waterproof watches and diving computers


MS54xx Miniature SMD Pressure Sensors Electrical Characteristics
HIGH SENSITIVITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)


 Parameter
 Min
 Typ
 Max
 Unit
MS5401-AM
 Operating pressure range
 0 - 1 bar
Full-scale span (FS)
 190 240 290 mV
Sensitivity
 190 240 290 mV/bar
Linearity
 - ±0.15
 ±0.40
 % FS
MS5407-AM
 Operating pressure range
 0 - 7 bar
Full-scale span (FS)
 322 392 462 mV
Sensitivity
 46 56 66 mV/bar
Linearity
±0.15
 ±040
 % FS
MS5470-AM
 Operating pressure range
 0 - 70 bar
Full-scale span (FS)
 250 310 370 mV
Sensitivity
 3.6 4.4 5.3 mV/bar
Linearity
±0.25
 ±0.50
 % FS
All Ranges
 Operating temperature range
 -40 - 125 °C
Zero pressure offset
 -40 0 40 mV
Pressure hysteresis
 - - ±0.20
 % FS
Temperature hysteresis
 - 0.3 0.8 % FS
Repeatability
 - - ±0.20
 % FS
Bridge resistance
 3.0 3.4 3.8 kΩ
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
 +2'400
-1'500
-80
 2'900
-1'900
-
 +3'300
-2'300
+80
 ppm/°C
ppm/°C
µV/°C

HIGH LINEARITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)

Parameter
 Min
 Typ
 Max
 Unit
MS5401-BM
 Operating pressure range
 0 - 1 bar
Full-scale span (FS)
 120 150 180 mV
Sensitivity
 120 150 180 mV/bar
Linearity
 - ±0.05
 ±0.20
 % FS
MS5412-BM
 Operating pressure range
 0 - 12 bar
Full-scale span (FS)
 120 150 180 mV
Sensitivity
 10 12.5 15 mV/bar
Linearity
±0.05
 ±0.15
 % FS
All Ranges
 Operating temperature range
 -40 - 125 °C
Zero pressure offset
 -40 0 40 mV
Pressure hysteresis
 - - ±0.20
 % FS
Temperature hysteresis
 - 0.3 0.8 % FS
Repeatability
 - - ±0.20
 % FS
Bridge resistance
 3.0 3.4 3.8 kΩ
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
 +2'400
-1'500
-80
 2'900
-1'900
-
 +3'300
-2'300
+80
 ppm/°C
ppm/°C
µV/°C

MS54xx Miniature SMD Pressure Sensors Ordering Information
Product code
 Product
 Art. No
 Package
 Delivery Form
MS5401-AM
 Miniature pressure sensor 1 bar, High
sensitivity
 325401001-00
 Ceramic carrier
 Tube
325401001-50
 Ceramic carrier
 Tape and Reel
325401006-00
 Ceramic carrier,
without
transparent gel
 Tube
MS5401-BM
 Pressure sensor 1 bar, High linearity
 325401000-00
 Ceramic carrier
 Tube
325401000-50
 Ceramic carrier
 Tape and Reel
325401002-00
 Ceramic carrier,
without
transparent gel
 Tube
MS5407-AM
 Miniature pressure sensor 7 bar, High
sensitivity
 325407000-00
 Ceramic carrier
 Tube
325407000-50
 Ceramic carrier
 Tape and Reel
325407001-00
 Ceramic carrier,
without
transparent gel
 Tube
MS5412-BM
 Pressure sensor 12 bar, High linearity
 325412000-00
 Ceramic carrier
 Tube
325412000-50
 Ceramic carrier
 Tape and Reel
MS5470-AM
 Miniature pressure sensor 70 bar,
High sensitivity
 325470000-00
 Ceramic carrier
 Tube

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