• Phosphine Sensor (PH3 Sensor)
  • Phosphine Sensor (PH3 Sensor)
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Phosphine Sensor (PH3 Sensor)

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  • Price

    Price on request   ≥1piece

  • Model Number

    PH3-B1

  • Data Sheet

  • Package

    Original packaging

  • Specs

    PH3-B1

  • Quantity

    - +

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Product Description

PH3-B1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.


PH3-B1 Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity
 nA/ppm in 5ppm PH3
 600 to 1000
Response time
 t90 (s) from zero
 < 20
Zero current
 ppm equivalent in zero air
 < -0.3 to +0.3
Resolution
 RMS noise (ppm equivalent)
 < 0.03
Range
 ppm limit of performance warranty
 10
Linearity
 ppm PH3 error at full scale,linear at zero,4ppm PH3
 -1 to -1.8
Overgas limit
 maximum ppm for stable response to gas pulse
 150



PH3-B1 Phosphine Sensor PH3 Sensor LIFETIME
Zero drift
 ppm equivalent change/year in lab air
 < 0.05
Sensitivity drift
 % change/year in lab air, monthly test
 < 4
Operating life
 months until 80% original signal (24 month warranted)
 > 24



PH3-B1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C
 %(output @ -20°C/output @ 20°C) @ 5ppm PH3
 65 to 85
Sensitivity @ 50°C
 %(output @ 50°C/output @ 20°C) @ 5ppm PH3
 120 to 140
Zero @ -20°C
 ppm equivalent change from 20°C
 < ±0.5
Zero @ 50°C
 ppm equivalent change from 20°C
 < 0 to +0.2



PH3-B1 Phosphine Sensor PH3 Sensor CROSS SENSITIVITY
CO    sensitivity
 % measured gas @ 400ppm CO
 < 1
H2S  sensitivity
 % measured gas @ 20ppm H2S
 < 170
NO2  sensitivity
 % measured gas @ 20ppm NO2
 < -30
Cl2    sensitivity
 % measured gas @ 10ppm Cl2
 < 0.1
NO    sensitivity
 % measured gas @ 50ppm NO
 < 30
SO2   sensitivity
 % measured gas @ 20ppm SO2
 < 30
H2     sensitivity
 % measured gas @ 400ppm H2 at 20°C
 < 0.3
C2H4 sensitivity
 % measured gas @ 400ppm C2H4
 < 20
NH3   sensitivity
 % measured gas @ 20ppm NH3
 < 0.2
CO2   sensitivity
 % measured gas @ 5% CO2
 < 0.1



PH3-B1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONSP
Temperature range
 °C
 -30 to 50
Pressure range
 kPa
 80 to 120
Humidity range
 % rh continuous
 15 to 90
Storage period
 months @ 3 to 20℃ (stored in sealed pot)
 6
Load resistor
 Ω
 10 to 33
Weight
 g
 < 13


Matched Transmitter board for PH3-B1 PH3 Sensor

4-20mA Digital Transmitter Board
   • Factory calibration, custom-set for immediate use
   • Digital zero, sensitivity and temperature compensation
   • Digital and 4-20mA output
   • Biased or unbiased operation
   • Calibration and range change