Thermal Mass Flow Sensor

Dimensions (L x W x H / H2 in mm):*

6.9 x 2.4 x 0.20 / 0.60

Ø 6.0 (±0.1) mm , LH = 14 (±0.2) mm (complete dimensions in application note)

Operating measuring range:

0 m/s to 100 m/s

Response sensitivity:

0.01 m/s

Accuracy:

< 3 % of the measured value (dependent on the electronics and calibration)

Response time t₆₃:

~160 ms (jump from 0 to 10000 sccm)

Operating temperature range:*

-20 °C to +150 °C

Temperature sensitivity:

< 0.1 %/K (dependent on the electronics)

Connection:*

3 pins, AWG 30/7, stranded wire, insulated with PTFE

Heater:*

R_H (0 ℃) = 45 Ω ±1 %

Reference element:*

R_s (0 ℃) = 1200 Ω ±1 %

Voltage range (nominal):*

2 V to 5 V (at ∆ T = 30 K (0 m/s ≤ v_gas ≤ 100 m/s)

Maximum heater voltage:*

3 V (at 0 m/s)

Alternative construction:*

Moulded plastic housing