• MEMS Mass Flow Sensors
  • MEMS Mass Flow Sensors
  • MEMS Mass Flow Sensors
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MEMS Mass Flow Sensors

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  • Price

    Price on request   ≥1piece

  • Model Number

    FS4001

  • Data Sheet

  • Package

    Original packaging

  • Specs

    FS4001

  • Quantity

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Product Description

FS4001 MEMS Mass Flow Sensors Description

FS4001 series mass flow sensors are manufactured using MEMS flow sensor and package technology. The sensors are specially designed for low flow rate range applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm. The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved.   

FS4001 MEMS Mass Flow Sensors Features
- Low mass flow range from  0 ~ 30 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of ±1.5 %
- Fast response (4 ms selectable)
- Pressure rating up to 5 bar (73 psi)
- Analog and/or digital user interface  
- Easy installation


FS4001 MEMS Mass Flow Sensors Mechanical Dimensions


FS4001 MEMS Mass Flow Sensors Performance Specifications
All data unless otherwise noted apply for calibration conditions: air, 20°C, 101.325kPa absolute pressure, horizontal mounting.

Model
 FS4001 
 unit
Flow Range
 0 ~ 30, 100, 200, 500, 1000, or customer specified 
 sccm
Turn-down Ratio
 >100:1
Accuracy
 ±(1.5 + 0.5 FS)
 %
Repeatability
 ± 0.25
 %Reading
Null Shift
 ± 30
 mV
Output Shift
 ± 0.2
 %/°C
Response Time
 65 (Default, 4, 8, 16, 33, 131 selectable)
 ms
Output
 Linear: RS232, Analog 0.5 ~ 4.5 Vdc
Pressure Drop
 < 30
 Pa
Pressure Range
 -0.08 ~ +0.5
 MPa
Power Supply
 8 ~ 24 Vdc, 50 mA
Operating Current
 20 typical when RS232 not connected
 mA
25 typical when RS232 communicates with a PC
Power Consumption
 <200
 mW
Working Temperature
 -5 ~ +55
 °C


FS4001 MEMS Mass Flow Sensors Product Selection