• FS8000 Series MEMS Mass Flow Sensors
  • FS8000 Series MEMS Mass Flow Sensors
  • FS8000 Series MEMS Mass Flow Sensors
  • FS8000 Series MEMS Mass Flow Sensors
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FS8000 Series MEMS Mass Flow Sensors

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  • Price

    Price on request   ≥1piece

  • Model Number

    FS8001/FS8003

  • Data Sheet

  • Package

    Original packaging

  • Specs

    FS8001/FS8003

  • Quantity

    - +

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Product Description

FS8000 Series Gas Flow Sensors Description
The FS8000 mass Flow sensors are designed and manufactured using MEMS flow sensor and package technology.

The FS8000 mass Flow sensors are developed preliminarily for die-attachment equipment air flow path control during pick and placement, and possibly for other instrumentation applications.

The packaging enclosure id made of the chemically inert and thermally stable polyphenylene sulfite (PPS,FS8001) or polycarbonate (PC, FS8003) material.

The FS8000 requires a power supply of 8~24 Vdc, and provides an analog output of 0.5~4.5 Vdc corresponding to the flow rate from 0 to full scale.


FS8000 Series Gas Flow Sensors Features
- Fast response time
- High sensitivity
- Low pressure drop
- Miniature design for easy installation

FS8000 Series Gas Flow Sensors Mechanical Dimensions


FS8000 Series Gas Flow Sensors Specifications

Parameter FS8001
 FS8003
 Unit
Flow Range
 (0~500) sccm (0~6) SLPM
Accuracy
 ± (2+0.5FS)
 %
Repeatability
 ± 1.0
 %FS
Output
 Non-linear, Analog voltage/I2C
Analog Output Range
 0.5 ~ 4.5 Vdc
Null Shift
 < 30 mVdc
Output Shift
 < ±0.12 %/℃
Response Time
 5 ms
Power Supply
 8 ~ 24 Vdc, 50 mA
Operating Current
 17 mA
Max. Working pressure 0.5 MPa
Working Temperature
 0 ~ +55 ℃
Storage Temperature
 -20 ~ +65 ℃
Humidity
 < 95 %RH (No icing or condensation)
Mechanical Connection M5 Rc 1/8(Inlet), M5 (Outlet)
Connector
SM05B-SRSS-TB (JST)

Calibration Air (@ 20℃, 101.325kPa)