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Thermal Mass Flow Sensor

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Further advantages of the FS2 thermal mass flow sensor include:

• Detection of flow direction

• Excellent long-term stability

• Simple signal processing

• Simple calibration

• Outstanding sensitivity

• Bare sensor resists up to +450 °C (customer specific)

• Stable platinum technology

• Excellent reproducibility

• No moving mechanical parts

• Customer-specific sensor available upon request

The IST AG FS2 flow sensors are optimal for measuring gas flow and direction.

Illustration¹⁾

Technical Sensor Data:

Dimensions (L x W x H / H2 in mm)*	5.0 x 3.5 x 0.20 / 0.60
Operating measuring range	0 m/s to 1 m/s (half bridge mode) 0 ml/min to 50 ml/min (half bridge mode), tube ID about 1 mm 0 m/s to 100 m/s (CTA mode) 0 l/min to 5 l/min (CTA mode), tube ID about 1 mm
Minimum operating rang	0 ml/min to 2.5 ml/min
Response sensitivity	0.001 m/s (50 μl/min)
Accuracy	< 2 % of the measured value (dependent on the electronics and calibration)
Response time t₆₃	< 0.5 s
Operating temperature range*	-20℃ to +150℃
Temperature sensitivity	< 0.1 %/K (dependent on the electronics)
Connection*	Cu-wire, enameled, Ø 0.2 mm
Heater*	R_H (25℃) = 34 Ω ±1 %
Measuring element*	R_{s_i} (25℃) = 425 Ω ±10 %
Reference element*	R_R(25℃) = 710 Ω ±10 %
Voltage range (nominal)*	2 V to 5 V (dependent on flow rate)

*customer specific versions on request