Thermal Mass Flow Sensor

Dimensions ( L × W × H )

5.05 mm × 3.55 mm × 0.20 mm

Operating measuring range

0 m/s to 1 m/s (half bridge mode)

0 ml/min to 50 ml/min (half bridge mode), tube ID about 1 mm

0 m/s to 100 m/s (CTA mode)

0 l/min to 5 l/min (CTA mode), tube ID about 1 mm

Minimum operating range

0 ml/min to 2.5 ml/min

Response sensitivity

0.001 m/s (50 μl/min)

Accuracy

< 2 % of the measured value (dependent on the electronics and calibration)

Response time t₆₃

< 0.5 s

Operating temperature range

-20℃ to +150℃

Temperature sensitivity

< 0.1 %/K (dependent on the electronics)

Heater

R_H (25℃) = 34 Ω ±10 %

Measuring element

R_SL (25℃) = 425 Ω ±10 %

R_SR (25℃) = 425 Ω ±10 %

Reference element

R_amb (25℃) = 710 Ω ±10 %

Voltage range (nominal)

2 V to 5 V (dependent on flow rate)

Connection

Cu-wire, enameled, Ø 0.2 mm