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SMT Thermal MEMS Differential Pressure Sensors
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Price on request ≥1piece
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Model Number
MDP2000/MDP3000 -
Data Sheet
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MDP2000/MDP3000 -
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Product Description
MDP2000/MDP3000 Differential Pressure Sensors General Description
MEMSIC's MDP2000 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on MEMSIC's highly successful proprietary CMOS thermal accelerometers already sold in millions. MDP2000 series offers a wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis.
MEMSIC's thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of providing SPI output of 15 bit digital raw counts. The polynomial fitting calibration coefficients are provided by QR code label for easy scanning to convert output to differential pressure.
MDP2000/MDP3000 Differential Pressure Sensors Features
• Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
• Pressure based on thermal micro-flow measurement
• Outstanding hysteresis and repeatability
• Linearized and temperature compensated
• SPI with 16bit resolution
• Cost Effective
• RoHS and REACH compliant
• SMT Package
MDP2000/MDP3000 Differential Pressure Sensors Applications
• Medical CPAP and Ventilator
• HAVC and building control solution
• Burner Control
• Filter Monitoring
• Process Control and Automation
MDP2000/MDP3000 Differential Pressure Sensors Performance
MDP2000/MDP3000 Differential Pressure Sensors Environment
MDP2000/MDP3000 Differential Pressure Sensors Electrical
MDP2000/MDP3000 Differential Pressure Sensors Material
MEMSIC's MDP2000 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on MEMSIC's highly successful proprietary CMOS thermal accelerometers already sold in millions. MDP2000 series offers a wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis.
MEMSIC's thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of providing SPI output of 15 bit digital raw counts. The polynomial fitting calibration coefficients are provided by QR code label for easy scanning to convert output to differential pressure.
MDP2000/MDP3000 Differential Pressure Sensors Features
• Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
• Pressure based on thermal micro-flow measurement
• Outstanding hysteresis and repeatability
• Linearized and temperature compensated
• SPI with 16bit resolution
• Cost Effective
• RoHS and REACH compliant
• SMT Package
MDP2000/MDP3000 Differential Pressure Sensors Applications
• Medical CPAP and Ventilator
• HAVC and building control solution
• Burner Control
• Filter Monitoring
• Process Control and Automation
MDP2000/MDP3000 Differential Pressure Sensors Performance
|
Parameter |
Value |
Unit |
|
Measurement Range |
±500 |
Pa |
|
Zero-point Accuracy |
±0.5 |
Pa |
|
Span Accuracy |
± 3.0 |
% m.v |
|
Linearity (Least Square) |
0.5 |
%F.S |
|
Gas Flow Through Sensor |
100 |
ml/min |
|
Zero-point Repeatability and Hysteresis |
0.2 |
Pa |
|
Response Time/ Communication Update Rate |
8 |
ms |
|
Span Repeatability and Hysteresis |
0.5 |
% m.v. |
|
Over Pressure |
5 |
Bar |
|
Temperature Compensation Coefficient |
TBD |
|
|
Span Shift due to Temperature Variation |
± 0.05 |
%m.v. per ºC |
|
Offset Shift due to Temperature Variation |
< Noise |
|
|
Offset Stability |
<0.1 |
Pa/year |
MDP2000/MDP3000 Differential Pressure Sensors Environment
|
Parameter |
Value |
Unit |
|
Operating Temperature |
-20 to +80 |
ºC |
|
Storage Temperature |
-40 to +125 |
ºC |
|
Relative Humidity (Non-Condensing) |
To 95 |
% |
|
Radiated Susceptibility |
10 |
V/m |
|
ESD |
4/(8) |
kV |
|
Shock |
50G @ 5 ms |
GPeak |
|
Vibration (5-2000 Hz) |
20 |
Grms |
|
Media Compatibility |
N2, O2, Air |
|
|
Orientation Sensitivity |
TBD |
Pa |
|
Protection |
IEC IP30 |
|
MDP2000/MDP3000 Differential Pressure Sensors Electrical
|
Parameter |
Description |
Min |
Typ |
Max |
Unit |
|
Flow Output (SPI) |
Positive Pressure |
32768 |
|
65535 |
counts |
|
Negative Pressure |
32768 |
|
0 | ||
|
Temperature Output |
SPI |
|
10 |
|
bits |
|
Temperature Resolution |
|
|
0.3 |
|
ºC/LSB |
|
A/D Sample Rate |
|
|
|
150 |
Hz |
|
SPI Clock Frequency |
|
|
2 |
|
MHz |
|
Supply Voltage |
|
2.7 | 3.3 |
|
Vdc |
|
Operating Current |
Zero Flow |
|
2.4 |
|
mA |
|
Max Flow
Measurement
|
|
4.2 |
|
mA |
|
|
Sleep Current |
|
|
0.1 |
|
uA |
|
Wake UpTime |
@ 25 KHz Clock
Frequency
|
100 |
|
|
ms |
MDP2000/MDP3000 Differential Pressure Sensors Material
|
Parameter |
Description |
|
Wetted Material |
LCP, FR4, Silicon Nitrite, Epoxy, Gold |