Piezoresistive Silicon Pressure Sensors
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SPA402 Series -
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Product Description
Piezoresistive Silicon Pressure Sensor Module for medium pressure ranges
SPA402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPA 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Product highlights include excellent overpressure characteristics and chemical resistance. Media isolated sensors are designed to operate in hostile environments and yet give the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.
The sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique design of pressure sensor is at a minimum volume so the accuracy is greatly improved.
The SPA 402 silicon pressure sensor is a thermally compensated device and has am amplified output with a ratiometric output signal (10% to 90% of supply voltage). This new pressure sensor offers design engineers excellent performance in various applications, especially for low pressure and smaller solutions.
SPA402 Series Piezoresistive Silicon Pressure Sensors Features
• Amplified
• Calibrated and compensated
• With media separation
• Excellent media resistance
• O-ring mounting
• Pressure ranges: 5 to 500 psi
SPA402 Series Piezoresistive Silicon Pressure Sensors Applications
• Industrial
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)
• Process industry
SPA402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply voltage 5V at reference conditions unless otherwise specified
SPA402 Series Piezoresistive Silicon Pressure Sensors Ordering Codes
SPA402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPA 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Product highlights include excellent overpressure characteristics and chemical resistance. Media isolated sensors are designed to operate in hostile environments and yet give the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.
The sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique design of pressure sensor is at a minimum volume so the accuracy is greatly improved.
The SPA 402 silicon pressure sensor is a thermally compensated device and has am amplified output with a ratiometric output signal (10% to 90% of supply voltage). This new pressure sensor offers design engineers excellent performance in various applications, especially for low pressure and smaller solutions.
SPA402 Series Piezoresistive Silicon Pressure Sensors Features
• Amplified
• Calibrated and compensated
• With media separation
• Excellent media resistance
• O-ring mounting
• Pressure ranges: 5 to 500 psi
SPA402 Series Piezoresistive Silicon Pressure Sensors Applications
• Industrial
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)
• Process industry
SPA402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply voltage 5V at reference conditions unless otherwise specified
Standard Pressure Ranges |
|||||||||||
PSI |
bar |
Output signal (Offset) |
Output signal (FSO) |
Proof pressure
[PSI/bar]
|
Negative pressure
[PSI/bar]
|
Burst pressure
[PSI/bar]
|
|||||
|
@ Vs = 5 V |
|
@ Vs = 5 V |
||||||||
5 |
0.35 |
10 % Vs |
0.5 V |
90 % Vs |
4.5 V |
30 |
2 |
-- |
-- |
15 |
≥ 3 |
15 | 1 | 75 | 5 |
-- |
-- |
112 |
≥ 7.5 |
||||
30 | 2 | 150 | 10 |
-- |
-- |
225 |
≥ 15 |
||||
50 | 3.5 | 250 | 17.5 |
-- |
-- |
375 |
≥ 25 |
||||
100 | 7 | 250 |
35 |
-15 |
-1 |
750 |
≥ 50 |
||||
300 |
20 |
1200 | 80 |
-15 |
-1 |
1800 |
≥ 120 |
||||
500 | 35 | 1500 | 105 |
-15 |
-1 |
3150 |
≥ 210 |
||||
Supply / Performance |
|||||||||||
|
min. |
typ. |
max. |
||||||||
Supply voltage Vs [V] |
2.7 |
5.0 |
5.5 |
||||||||
Current consumption [mA] |
2.5 max. |
||||||||||
Linearity [% FSO BFSL] |
- 0.25 |
±0.1 |
0.25 |
||||||||
Hysteresis [%FS0] |
- 0.05 |
±0.02 |
0.05 |
||||||||
Output load resistance [kΩ] |
≥ 5 |
||||||||||
Insulation resistance [MΩ] |
50 (between housing and sensor chip) @ 50 V DC |
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Thermal errors |
|||||||||||
|
pn ≤ 5 psi |
pn ≤ 5 psi |
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Thermal error offset [% FSO] |
≤ ±1.0 |
≤ ±0.75 |
|||||||||
Thermal error span [% FSO] |
≤ ±1.0 |
error band ≤ 1.4 |
|||||||||
|
0 to 70 °C (32 to 158 °F) |
0 to 85 °C (32 to 185 °F) |
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Operating temperature ranges |
|||||||||||
Media |
-40 to 125 °C (-40 to 257 °F) |
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Storage |
-40 to 125 °C (-40 to 257 °F) |
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Mechanical stability |
|||||||||||
Vibration |
10 g RMS (20 to 2000 Hz) |
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Schock |
100 g / 11 ms |
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Electrical connections |
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Standard |
JST connector |
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Materials |
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Housing |
Stainless steel 316L (1.4404) |
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Diaphragm |
Stainless steel 316L (1.4435) |
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Media wetted parts |
Housing, diaphragm |
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Miscellaneous |
|||||||||||
Installation position |
any |
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Protection class |
IP 00 |
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Weight |
Standard: approx. 10 g |
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Sealing |
O-Ring 15.5 x 1.5 (material: FKM) |
SPA402 Series Piezoresistive Silicon Pressure Sensors Ordering Codes