• MEMS Differential Pressure Sensors
  • MEMS Differential Pressure Sensors
  • MEMS Differential Pressure Sensors
  • MEMS Differential Pressure Sensors
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MEMS Differential Pressure Sensors

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  • Price

    Price on request   ≥1piece

  • Model Number

    MDP200 Series

  • Data Sheet

  • Package

    Original packaging

  • Specs

    MDP200 Series

  • Quantity

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Product Description

MDP200 Series MEMS Differential Pressure Sensors General Description
MEMSIC's MDP200 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on MEMSIC's highly successful proprietary CMOS thermal accelerometers already sold in millions. MEMSIC's thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital format. The signal is linearized and temperature compensated. 

MDP200 series offers a wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis. The MDP200 is also available as a low cost flow detector with an analog output and it can easily be configured to suit a variety of applications from burner control, HVAC, medical flow to industrial processing control. 

MDP200 Series MEMS Differential Pressure Sensors Features
• Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
• Pressure based on thermal micro-flow measurement
• Outstanding hysteresis and repeatability
• Linearized and temperature compensated
• Digital I2C with 16bit resolution
• Cost Effective
• RoHS and REACH compliant
• Digital I2C Output
• Detects pressure difference as low as 0.02 Pascal

MDP200 Series MEMS Differential Pressure Sensors Applications
• Medical CPAP and Ventilator
• HAVC and building control solution
• Burner Control
• Filter Monitoring
• Process Control and Automation

MDP200 Series MEMS Differential Pressure Sensors Performance 
Parameter
 -500 Pa
 Unit
Measurement Range
 ±500
 Pa
Zero-point Accuracy
 Below Resolution (0.016 Pa)
 Pa
Span Accuracy
 ± 3.0
 % m.v
Total Error (0ºC - 50ºC)
 ±3.5
 % m.v
Zero-point Repeatability and Hysteresis
 ±0.05
 Pa
Resolution (Near Zero)/
Lowest Detectible Pressure
 0.016
 Pa
Response Time/
Communication Update Rate
8
 ms
Span Repeatability and
Hysteresis
 0.5
 % m.v.
Over Pressure
 1.5
 Bar
Span Shift due to
Temperature Variation
 0.05
 %m.v. per ºC
Offset Shift due to
Temperature Variation
 <0.03
 Pa
Offset Stability
 Pa/year
Non-Linearity(BFSL)
0.3% (0-100 Pa)
0.4% (0-200 Pa)
0.8%(0-500 Pa)
 % Full Scale
Orientation Sensitivity
< resolution - port @ 90º vs 270º
<0.05 Pa - port @ 180º vs 90º
 Pa
Gas Flow Through Sensor
 100
 ml/min

MDP200 Series MEMS Differential Pressure Sensors Environment
Parameter
 -500 Pa
 Unit
Operating Temperature
 -20 to +80
 ºC
Storage Temperature
 -40 to +85
 ºC
Relative Humidity (Non-
Condensing)
 To 95
 %
Radiated Susceptibility 5
 V/m
ESD
 4/(8)
 kV
Shock
 50G @ 5ms
 GPeak
Vibration (5-2000 Hz)
 20
 Grms
Media Compatibility
 N2, O2, Air
Orientation Sensitivity
 TBD
 Pa
Protection
 IEC IP30
Barb Strength
 4
 lbf (3 orthogonal directions)

MDP200 Series MEMS Differential Pressure Sensors Electrical
Parameter
 -500 Pa
 Unit
Input Voltage Range
 3.0-3.6
 Vdc
Supply Current
 7 mA
Interface
 I2C
Resolution
 16 (bi-direction)
 Bit
Bus Clock Frequency
 < 400
 KHz
I2C Default Address
 0x31

MDP200 Series MEMS Differential Pressure Sensors Mechanical Specifications


MDP200 Series MEMS Differential Pressure Sensors Ordering Information
Options
 Ranges
 Calibration
 Housing
MDP200
 -500
   500Pa
 B
   Bi-Directional
 Y
   Barb
U
   Uni-Directional
 T
   Manifold
Example: MDP200-500BY = MDP200 differential pressure sensor, 500 Pascal, Bi-Directional, Barb Fitting