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Capacitive Humidity Sensor

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Further advantages of the P14 2FW Thermo capacitive RH sensor include:

• Fast recovery time

• Heating of humidity sensor (humidity sensor and heater on one chip)

• Temperature measurement on-chip

• Very low drift

• Wide temperature range

• High humidity stability

• Condensation resistance

• High chemical resistance

• Customer-specific sensor available upon request

The IST AG P14 FemtoCap humidity sensor is available as SMD for automatic packaging as standard configuration.

Illustration¹⁾：

1) For actual size, see dimensions

Technical Data:

Dimensions (L x W x H / H2 in mm)	5.0 x 3.8 x 0.4 / 0.8
Operating humidity range	0 % RH to 100 % RH (maximal dew point +85℃)
Operating temperature range	-50℃ to +150℃
Heater/temperature sensor*	Pt100
Heater/temperature sensor accuracy	IEC 60751 F0.3 (class B)
Capacitance (C₃₀)*	150 pF ±50 pF (at 30 % RH and +23℃)
Sensitivity (at C₃₀ = 150 pF)	0.25 pF/% RH (15 % RH to 90 % RH)
Loss factor	< 0.01 (at 23℃, at 10 kHz, at 90 % RH)
Linearity error	< 1.5 % RH (15 % RH to 90 % RH at +23℃ after one point calibration)
Hysteresis	< 1.5 % RH
Response time t₆₃	< 6 s (50 % RH to 0 % RH at +23℃)
Temperature dependence (typical)	∆ % RH = (B1 x % RH + B2) x T [℃] + (B3 x % RH + B4) B1 = 0.0014 [1/℃] B2 = 0.1325 [% RH/℃] B3 = -0.0317 B4 = -3.0876 [% RH]
Measurement frequency	1 kHz to 100 kHz (recommended 10 kHz)
Maximal supply voltage	< 12 V_pp AC
Signal form	alternating signal without DC bias
Connections	Ni/Au-flat wire

* Customer-specific alternatives available

The calibration of the sensor must be done 5 days after soldering at the earliest.